Plasma Etching
Plasma etching is an excellent supplementary method of sample preparation to eliminate, e.g., artefacts contaminating the sample surface or to gradually remove layers on a nanometer scale (ion-etching).
Plasma etching with the LEO 1525
The plasma etcher and polisher is flanged on the LEO 1525 scanning electron microscope.
This enables the samples treated with Argon ion plasma to be directly transferred_ contamination-free - into the SEM in a high vacuum.