LEO 1525 Gemini
Field emission cathode for resolutions up to 2 nm
LEO 1525 Gemini - with the following equipment which can be used simultaneously for analysing samples in the scanning electron microscope.
Technical data:
- Sample dimensions: lateral 120 mm x 120 mm / maximum height 30 mm
- Acceleration voltage: 100 V to 30 kV
- Secondary electron detector (Everhard-Thornley)
- High-efficiency in-lens detector for high resolution
- AsB; angle-sensitive 4-quadrant semi-conductor
- Backscatter electron detector
- Infrared camera in the sample room
- EDX, CL